[23p-F308-1~14] 13.2 Exploratory Materials, Physical Properties, Devices

[23p-F308-3] Characterizations of B-doped BaSi₂ films formed by sputtering

〇Hayato Hasebe¹, Ryota Koitabashi¹, Kazuki Kido¹, Yudai Yamashita¹, Masami Mesuda², Kaoru Toko¹, Takashi Suemasu¹ (1.Tsukuba Univ., 2.Tosoh Corp.)

Keywords:semiconductor, sputtering, solar cell