[23p-P05-1~11] 6.2 Carbon-based thin films

[23p-P05-4] Structural changes of hydrogenated diamond-like carbon (DLC) films
by the irradiation of the soft X-rays

〇Daisuke Niwa¹, Tomohiro Mishima¹, Hibiki Terai¹, Koji Nakanishi¹, Masahito Niibe¹, Kazuhiro Kanda¹, Fuminobu Hori², Atsushi Yabuuchi³, Atsushi Kinomurra³ (1.LASTI,Univ.Hyogo, 2.Eng,Osaka Pref.Univ., 3.RNS,Kyoto Univ.)

Keywords:hydrogenated diamond-like carbon films