The 69th JSAP Spring Meeting 2022

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Poster presentation

6 Thin Films and Surfaces » 6.2 Carbon-based thin films

[23p-P05-1~11] 6.2 Carbon-based thin films

Wed. Mar 23, 2022 1:30 PM - 3:30 PM P05 (Poster)

1:30 PM - 3:30 PM

[23p-P05-5] Structural analysis of Si-containing DLC films using X-ray Absorption Fine Structure

〇(B)Hibiki Terai1, Koji Nakanishi1, Masahito Niibe1, Kazuhiro Kanda1, Hiroki Akasaka2 (1.LASTI, Univ.Hyogo, 2.Eng., Tokyo Inst. Tech.)

Keywords:Si-containing DLC films, X-ray Absorption Fine Structure