1:30 PM - 3:30 PM
[23p-P06-16] Influence of Sputtering Pressure on Crystalline Property of YSZ Thin Films Deposited at Room-temperature by Reactive Sputtering
Keywords:YSZ Thin Film, Reactive Sputtering, Low-temperature Deposition
Presentation information
Poster presentation
6 Thin Films and Surfaces » 6.4 Thin films and New materials
[23p-P06-1~16] 6.4 Thin films and New materials
Wed. Mar 23, 2022 1:30 PM - 3:30 PM P06 (Poster)