[23p-P07-1~7] 15.3 III-V-group epitaxial crystals, Fundamentals of epitaxy

[23p-P07-2] Effect of Rapid Thermal Annealing on GaPN Alloys Irradiated with Proton Beam

〇(B)Mizumi Mochida¹, Keisuke Yamane¹, Kento Hirai¹, Takeshi Ohshima², Tetsuya Nakamura³, Mitsuru Imaizumi³, Akihiro Wakahara¹ (1.Toyohashi Tech., 2.QST, 3.JAXA)

Keywords:GaPN Alloys, Rapid Thermal Annealing (RTA), Proton

Recently, it was found that RTA on proton irradiated GaAsPN improves the power generation efficiency compared to RTA only, but the effect of RTA in this case remains unexplained. In this study, GaPN are irradiated with protons and compared with unirradiated samples to elucidate the effect of RTA.