[23p-P12-1~14] 21.1 Joint Session K "Wide bandgap oxide semiconductor materials and devices"

[23p-P12-10] Structural, electrical and optical properties of Ta, Nb, Ba and Sb-doped SnO₂ thin films prepared by metal organic decomposition using spin coating

〇Junji Sawahata¹ (1.Nat'l Inst. Tech. Ibaraki Coll.)

Keywords:SnO2, MOD