[24a-E105-1~10] 12.7 Biomedical Engineering and Biochips

△ [24a-E105-3] Lateral Metal Oxide Nanofilm Channel Crossbar Molecular Sensor Array

〇Haruka Honda¹, Tunaki Takahashi^1,2, Shitaro Nagata¹, Yohsuke Shiiki³, Takuro Hosomi^1,2, Wataru Tanaka¹, Kazuki Nagashima^1,2, Hiroki Ishikuro³, Takeshi Yanagida^1,4 (1.Dept. Eng. Univ. of Tokyo, 2.JST PRESTO, 3.Sci. Tech. Keio Univ., 4.Eng. Sci. Kyushu Univ.)

Keywords:integrated sensor array, molecule recognition, oxide semiconductor

Molecular group identification technology with integrated molecular sensors has been attracting attention. While there is a lot of research on sensitive materials for molecular identification and improvement of sensor sensitivity, the effects of wiring resistance between sensors due to high-density integration and the design of integrated sensor arrays that can operate stably over a long period of time remain important unresolved issues. Here, we propose a crossbar-integrated molecular sensor array with horizontal metal oxide nanofilm channel structures and conductive oxide electrodes to solve these problems.