[24a-E202-1~10] 15.4 III-V-group nitride crystals

△ [24a-E202-2] High-spatial-resolution 3D tomographic analysis using depth-resolved nanobeam X-ray diffraction for thick AlN films on cone-type nano-patterned sapphire substrates

〇Yudai Nakanishi¹, Yusuke Hayashi¹, Tetsuya Tohei¹, Kazushi Sumitani², Yasuhiko Imai², Shigeru Kimura², Shiyu Xiao³, Hideto Miyake^4,5, Akira Sakai¹ (1.Grad. Sch. Eng. Sci., Osaka Univ., 2.JASRI, 3.SPORR., Mie Univ., 4.Grad. Sch. RIS., Mie Univ., 5.Grad. Sch. Eng., Mie Univ.)

Keywords:Aluminum Nitride, AlN, nanobeam X-ray diffraction, UVCLED, DUVLED

A variety of unique structures exist in AlN templates consisting of nanopatterned sapphire substrates (NPSS) and face-to-face annealed sputter-deposited AlN (FFA Sp-AlN). In this study, we introduced a method for extracting the depth information of crystallinity step by step by scanning a platinum wire parallel to the sample surface in nanobeam X-ray diffraction and analyzed the crystalline changes peculiar to FFA Sp-AlN/cone-type NPSS in three dimensions.