[24a-F307-1~8] 6.4 Thin films and New materials

[24a-F307-4] Effects of sputtering with Kr gas and insertion of lowermost layer on electrical resistivity of Ag-multilayer

〇Koji Mizukoshi^1,2, Takafumi Yamamura³, Yasuhiro Tomioka³, Midori Kawamura¹ (1.Kitami Inst. of Tech., 2.YKK AP, 3.YKK)

Keywords:silver, low emissivity coating, sputtering