[24p-D114-1~11] 8.3 Plasma nanotechnology

[24p-D114-6] Analysis of three-dimensional structurers of carbon nanowalls grown by a radical-injection plasma-enhanced chemical vapor deposition system

〇Hiroki Kondo¹, Atsushi Ozaki², Takayoshi Tsutsumi¹, Makoto Sekine¹, Kenji Ishikawa¹, Masaru Hori¹, Mineo Hiramatsu³ (1.Nagoya Univ. Low-temp. Plasma, 2.Nagoya Univ. Eng., 3.Meijo Univ. Sci.Eng.)

Keywords:Carbon nanowalls, Plasma-enhanced chemical vapor deposition, Transmission electron microscopy

For carbon nanowalls (CNW), which are three-dimensional nanostructures composed of multi-layer graphene sheets grown vertically on a substrate, the local structure such as changes in wall thickness and connection between neighboring walls were analyzed by a transmission electron microscope. It was found that the wall-to-wall distance gradually increased from the bottom to the top, while the wall thickness increased once and then decreased again. These results suggest the fusion of neighboring walls and the sharpening of the wall top edges with the growth of CNW.