[24p-D114-1~11] 8.3 Plasma nanotechnology

△ [24p-D114-8] Effect of ion irradiation angle on oriented growth of carbon nanowalls in plasma-enhanced chemical vapor deposition

〇(M1)Shintaro Iba¹, Hiroki Kondou², Kenji Ishikawa², Takayoshi Tsutsumi², Mineo Hiramatsu³, Makoto Sekine², Masaru Hori² (1.Nagoya Univ. Eng., 2.Nagoya Univ. Center for Low-temperature Plasma Sciences, 3.Meijo Univ.)

Keywords:Carbon nanowalls