[24p-D316-1~11] 1.3 Novel technologies and interdisciplinary engineering

[24p-D316-3] Preparation of Metal-Insulator-Metal Disk Structures using Bilayer Colloidal Crystals

〇(M2)Aya Tachibana¹, Mina Sato², Akihiro Matsutani², Yasuhide Mochizuki¹, Toshihiro Isobe¹, Akira Nakajima¹, Sachiko Matsushita¹ (1.Tokyo Tech., 2.Tokyo Tech. OFC)

Keywords:plasmon, Colloidal Crystals

The collective oscillation of free electrons on a metal surface in resonance with the electric field of incident light is called surface plasmon resonance. This resonance depends on the size, shape, and particle distance of the metal nano structures. Most of the structures are prepared by lithography. In this study, we investigated the preparation of Au-SiO2-Au nano disks with plasmon resonance using a self-assembly method. The self-assembly method is inexpensive and can fabricate over a large area. Bi-layer colloidal crystals of polystyrene particles with diameters of 350- and 500-nm were prepared using the convective self-assembly method. After that, oxygen plasma etching was applied to create periodic gaps in the colloidal crystals. In the gaps, the Au-SiO2-Au nano disks were prepared by magnetron sputtering on this colloidal crystal, and removing the polystyrene with toluene.