[24p-E103-1~17] 13.4 Si processing /Si based thin film / MEMS / Equipment technology

[24p-E103-12] Low Temperature Fabrication of Metal/GeSn Contacts for Opt-Electronics Applications

〇Noboru Shimizu¹, Yi Wang¹, Keisuke Yamamoto¹, Shiyu Zhang², Osamu Nakatsuka^2,3, Dong Wang¹ (1.IGSES, Kyushu Univ., 2.GS of Eng., Nagoya Univ., 3.IMaSS, Nagoya Univ.)

Keywords:Germaniumu-tin (GeSn), Metal/GeSn contacts