The 69th JSAP Spring Meeting 2022

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Oral presentation

13 Semiconductors » 13.4 Si processing /Si based thin film / MEMS / Equipment technology

[24p-E103-1~17] 13.4 Si processing /Si based thin film / MEMS / Equipment technology

Thu. Mar 24, 2022 1:30 PM - 6:00 PM E103 (E103)

Yan Wu(Nihon Univ.), Katsunori Makihara(Nagoya Univ.)

2:00 PM - 2:15 PM

[24p-E103-3] Operand Measurement Using the Laboratory based Hard X-ray Photoelectron Spectroscopy with Bias Application

〇Tappei Nishihara1, Masatake Machida2, Atsushi Ogura1,3 (1.Meiji Univ., 2.ScientaOmicron Inc., 3.MREL)

Keywords:HAXPES, Operand