The 69th JSAP Spring Meeting 2022

Presentation information

Print

Oral presentation

13 Semiconductors » 13.4 Si processing /Si based thin film / MEMS / Equipment technology

[24p-E103-1~17] 13.4 Si processing /Si based thin film / MEMS / Equipment technology

Thu. Mar 24, 2022 1:30 PM - 6:00 PM E103 (E103)

Yan Wu(Nihon Univ.), Katsunori Makihara(Nagoya Univ.)

2:15 PM - 2:30 PM

[24p-E103-4] Study on Photoluminescence Properties of Fe-silicide-NDs

〇Hiroshi Furuhata1, Haruto Saito2, Katsunori Makihara1, Akio Ohta1, Noriyuki Taoka1, Seiichi Miyazaki1 (1.Grad. Sch. of Eng., Nagoya Univ., 2.Sch. of Eng., Nagoya Univ.)

Keywords:Silicide, nanodots