The 69th JSAP Spring Meeting 2022

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Oral presentation

CS Code-sharing session » 【CS.5】 Code-sharing Session of 6.1 & 13.3 & 13.5

[24p-E105-1~13] CS.5 Code-sharing Session of 6.1 & 13.3 & 13.5

Thu. Mar 24, 2022 1:30 PM - 5:00 PM E105 (E105)

Takao Shimizu(NIMS), Shoichi Kabuyanagi(キオクシア)

2:45 PM - 3:00 PM

[24p-E105-6] Formation of ferroelectric ZrO2 ultra-thin film by sputtering method

Jotaro Nagano1, 〇Shigehisa Shibayama1, Mitsuo Sakashita1, Osamu Nakatsuka1,2 (1.Nagoya Univ., 2.IMaSS, Nagoya Univ.)

Keywords:ZrO2, ferroelectric, sputtering