[24p-E201-1~9] Functional Materials for the Online Network Era- toward beyond5G/6G-

[24p-E201-7] Room-temperature, fast, and high-sensitivity detection of terahertz radiation using MEMS resonators

〇Kazuhiko Hirakawa^1,2, Ya Zhang³, Boqi Qiu¹, Tianye Niu¹, Naomi Nagai¹ (1.IIS, UTokyo, 2.INQIE, UTokyo, 3.TUAT)

Keywords:terahertz, detector, semiconductor heterostructures

In this talk, we introduce a novel terahertz (THz) detector that detects THz power by measuring a resonance frequency shift of a doubly clamped MEMS beam resonator fabricated with a semiconductor heterostructure. This MEMS detector can detect THz radiation 10 to 100 times faster, while having the same sensitivity as the conventional thermal sensors operated at room temperature.