[24p-E203-1~16] 23.1 Joint Session N "Informatics"

[24p-E203-9] Automatic Structure Estimation Using Bayesian Estimation and XPS Simulator

〇Hiroshi Shinotsuka¹, Malinda Siriwardana¹, Kenji Nagata¹, Hideki Yoshikawa¹, Hayaru Shouno² (1.NIMS, 2.UEC)

Keywords:X-ray photoelectron spectroscopy(XPS), Beyesian estimation, SESSA

Angle-resolved X-ray photoelectron spectroscopy (ARXPS) is used for non-destructive tomographic analysis of sample surfaces. In this study, we have developed an inverse problem system via the XPS simulator SESSA to estimate the unknown sample structure from ARXPS data. We tested our method for artificial data obtained from a virtual experiment assuming a four-layered sample as an example. As a result, we confirmed that not only the optimal parameters can be obtained, but also the accuracy of their estimation can be determined via the Bayesian posterior probability distribution.