[24p-E203-1~16] 23.1 Joint Session N "Informatics"

△ [24p-E203-8] Automatic analysis of unknown components in XPS depth profile spectra

〇(M2)Ryo Murakami¹, Hideki Yoshikawa², Kenji Nagata², Hiroshi Shinotsuka², Hiromi Tanaka³, Takeshi Iizuka⁴, Hayaru Shouno¹ (1.UEC, 2.NIMS, 3.Yonago KOSEN, 4.KRYSTAL Inc.)

Keywords:XPS, Spectral analysis

Our aim is to develop a fully automatic spectral analysis method using reference spectra. In this study, we developed a method to automatically analyze the measured spectra even when some of the reference spectra are missing and incorporated the unknown components represented by the addition of arbitrary Voigt functions into the automatic matching process. As a result, not only the peak parameters of the known/unknown component but also the optimal number of peaks representing the unknown component can be estimated.