[24p-E204-1~10] 6.2 Carbon-based thin films

△ [24p-E204-10] Evaluation of Electrical Resistance of amorphous carbon films with Substrate Dependence Under Mechanical Pressure

〇(M2)Azmi Muhamad¹, Ayumu Takada¹, Ryuto Hirawata¹, Naoki Yasuno¹, Shuji Obata¹, Noboru Miyata², Miyazaki Tsukasa², Yasuharu Ohgoe¹ (1.Tokyo Denki University, 2.CROSS, Neutron Science and Technology)

Keywords:Electrical resistivity, amorphous carbon films, PET

In this study, we evaluated the substrate dependence of the electrical resistivity of amorphous carbon films under compression. a-C:H and Sputtered a-C (:H) films showed a change in film structure under compression, and also showed lower resistivity on PET substrates with six-membered rings. These results indicate that the electrical resistance of DLC under compression is dependent on the substrate.