The 69th JSAP Spring Meeting 2022

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6 Thin Films and Surfaces » 6.2 Carbon-based thin films

[24p-E204-1~10] 6.2 Carbon-based thin films

Thu. Mar 24, 2022 1:30 PM - 4:15 PM E204 (E204)

Hiroki Akasaka(Tokyo Tech), Hidetoshi Saitoh(Nagaoka Univ. of Tech.)

1:45 PM - 2:00 PM

[24p-E204-2] Order of sp2 hybridized carbons in amorphous carbon film

Kazuhiro Kanda1, Masato Niibe1, Naoki Umada2, Yuki Hirata2, Naoto Ohtake2, 〇Hiroki Akasaka2 (1.Univ. of Hyogo, 2.Tokyo Inst. of Tech.)

Keywords:amorphous carbon film, sp2 hybridized carbons

3種の原料からアモルファス炭素膜を作製し，XASスペクトルの入射角度依存性を評価した結果，膜内にsp2結合炭素の構造秩序が存在し，原料により，その分布が変化する事が示唆された．