[24p-F308-1~11] CS.1 Code-sharing Session of 2.3 & 7.5

△ [24p-F308-11] Extraction of molecular structure information from the energy-per-atom-dependent mass spectrum of Ar cluster SIMS

〇Ken Mizuhata¹, Kousuke Moritani¹, Tetsuro Masumoto¹, Tomomichi Nakamura², Norio Inui¹ (1.Eng.,Univ. of Hyogo, 2.Info.,Univ. of Hyogo)

Keywords:ion beam, Secondary Ion Mass Spectrometry

For the secondary ion mass spectrometry (SIMS) using Ar cluster ions (Arn+) as a probe, the pattern of the mass spectrum changes depending on the average kinetic energy (E/n) per cluster constituent atom. This study measured the SIMS spectrum of the nitrobenzylpyridinium salt with varying E/n. In addition, we investigated a multivariate analysis method that analyzes a series of E / n-dependent SIMS spectral data. We demonstrated that molecular structure information could be extracted from a series of E/n dependent data by quantitatively evaluating the similarity of spectral patterns based on the correlation coefficient. This result suggests that this method greatly facilitates the interpretation of mass spectra.