[25a-D114-1~7] 15.5 Group IV crystals and alloys

[25a-D114-1] Solid-Phase Crystallization of Interface-Modulated Sn-Doped Ge / Insulator

〇Takaya Nagano¹, Ryutaro Hara¹, Masanori Chiyozono¹, Taizoh Sadoh¹ (1.Kyushu Univ.)

Keywords:semiconductor

界面変調Sn添加Ge極薄膜/絶縁基板の固相成長特性を調べた。