[25a-D114-1~7] 15.5 Group IV crystals and alloys

[25a-D114-7] Epitaxial growth of SiGe thin films by firing Al-Ge alloyed pastes on Si(111)

Keisuke Fukuda¹, 〇Satoru Miyamoto¹, Shota Suzuki^2,3, Masahiro Nakahara^1,2, Marwan Dhamrin^2,3, Kensaku Maeda⁴, Kozo Fujiwara⁴, Noritaka Usami¹ (1.Nagoya Univ., 2.Toyo Aluminium K.K., 3.Osaka Univ., 4.IMR, Tohoku Univ.)

Keywords:silicon-germanium thin films, IV-group alloy, crystal growth