[25a-E103-1~9] 13.4 Si processing /Si based thin film / MEMS / Equipment technology

△ [25a-E103-1] Cross-sectional shape effect of mechanical properties of micro-cantilevers made of Au single crystal

〇Ryohei Hori¹, Kazuya Fujita¹, Chun-Yi Chen¹, Tso-Fu Mark Chang¹, Hiroyuki Ito¹, Katsuyuki Machida¹, Yoshihiro Miyake¹, Masato Sone¹ (1.Tokyo Tech Inst.)

Keywords:sample size effect