[25a-E103-1~9] 13.4 Si processing /Si based thin film / MEMS / Equipment technology

△ [25a-E103-4] Evaluation of Device for High-Sensitivity MEMS Sensor Module

〇Akihiro Uchiyama¹, Kohei Shibata¹, Akira Onishi¹, Katsuyuki Machida¹, Taiki Ogata¹, Noboru Ishihara¹, Hirotaka Uchitomi¹, Tso-Fu Chang¹, Masato Sone¹, Yoshihiro Miyake¹, Hiroyuki Ito¹ (1.Tokyo Tech)

Keywords:MEMS accelerometer, noise characteristic, TPD

This paper describes the charactaristies and the suppressed technique of noise (drift) with high-sensitivity MEMS sensor module. To investigate the drift phenomenon using TPD analysis, we examined the behavior of H₂O in MEMS devices. As a result, TPD analysis results confirm that there were the spectra of the adsorbed H₂O at low temperature and the absorbed H₂O at high temperature.