[25a-E103-1~9] 13.4 Si processing /Si based thin film / MEMS / Equipment technology

△ [25a-E103-3] A Study on High-Sensitivity MEMS Sensor Module for Micro Muscle Sound Measurement

〇Akira Onishi¹, Kohei Shibata¹, Akihiro Uchiyama¹, Katsuyuki Machida¹, Taiki Ogata¹, Noboru Ishihara¹, Hirotaka Uchitomi¹, Tso-fu Chang¹, Masato Sone¹, Yoshihiro Miyake¹, Hiroyuki Ito¹ (1.Tokyo Tech)

Keywords:MEMS, Sensor Module, Muscle Sound

This paper presents a high-sensitivity MEMS (microelectromechanical systems) sensor module for micro muscle sound measurement. In order to reduce the noise floor, high-sensitivity sensor module is designed and fabricated. The noise floor of the developed MEMS sensor module is obtained around 10 dB lower than that of our previous one. Experimental results confirm that sensor module can be applied to micro muscle sound measurement.