The 69th JSAP Spring Meeting 2022

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13 Semiconductors » 13.4 Si processing /Si based thin film / MEMS / Equipment technology

[25a-E103-1~9] 13.4 Si processing /Si based thin film / MEMS / Equipment technology

Fri. Mar 25, 2022 9:30 AM - 12:00 PM E103 (E103)

Masato Sone(Tokyo Tech), Daisuke Yamane(Ritsumeikan Univ.)

11:00 AM - 11:15 AM

△ [25a-E103-6] A Study of MEMS Vibration Energy Harvesters with Self-Assembled Electrets

〇(BC)Reiki Sugimoto1, Kosuke Kawashima2, Hideyuki Kayaguchi3, Hisao Ishii3,4,5, Yuya Tanaka3,4, Daisuke Yamane1,2 (1.Ritsumeikan Univ., 2.GSSE, Ritsumeikan Univ., 3.GSSE, Chiba Univ., 4.CFS, Chiba Univ., 5.MCRC, Chiba Univ.)

Keywords:MEMS, Vibration Energy Harvesters