[25a-E103-1~9] 13.4 Si processing /Si based thin film / MEMS / Equipment technology

[25a-E103-9] Evaluation of Transferred FDSOI Transistors and Logic Circuits for Flexible CMOS Image Sensors

〇Masahide Goto¹, Shigeyuki Imura¹ (1.NHK STRL)

Keywords:image sensor, transfer, flexible

We have studied flexible CMOS image sensors to realize new image sensors with both high performance and flexibility. CMOS circuits and photoconductive films including crystalline selenium developed on FDSOI substrates were transferred to flexible plastic substrates. We confirmed the first operation of the transferred FDSOI transistors and logic circuits, demonstrating the feasibility of next-generation flexible CMOS devices.