The 69th JSAP Spring Meeting 2022

Presentation information

Oral presentation

13 Semiconductors » 13.4 Si processing /Si based thin film / MEMS / Equipment technology

[25a-E103-1~9] 13.4 Si processing /Si based thin film / MEMS / Equipment technology

Fri. Mar 25, 2022 9:30 AM - 12:00 PM E103 (E103)

Masato Sone(Tokyo Tech), Daisuke Yamane(Ritsumeikan Univ.)

11:30 AM - 11:45 AM

[25a-E103-8] A Non-Contact Out-of-Plane Vibratory Energy Harvester with an Electric Double Layer Electret

〇(BC)Keigo Nota1, Kentaro Tamura1, Kazumoto Miwa2, Shimpei Ono2, Daisuke Yamane1 (1.Ritsumeikan Univ., 2.Central Research Inst. of Electric Power Industry)

Keywords:Electric double layer electret, Vibratory energy harvesting, Out-of-plane