[25a-E202-1~9] 21.1 Joint Session K "Wide bandgap oxide semiconductor materials and devices"

[25a-E202-5] Fabrication of ZnO nanoparticle dispersed (Ga,Al)₂O₃ thin films by mist CVD

〇Tsukasa Yagasaki¹, Toshihiro Nara¹, Keisuke Tanaka¹, Riki Ito¹, Tetsuya Kouno^1,2, Yuuko Kominami^1,2, Kazuhiko Hara^1,2,3 (1.GSIST Shizuoka Univ., 2.GSST Shizuoka Univ., 3.RIE Shizuoka Univ.)

Keywords:mist CVD, Ga2O3