[25a-E204-1~10] 6.2 Carbon-based thin films

[25a-E204-1] [The 51st Young Scientist Presentation Award Speech] Development of heavily nitrogen-doped diamond growth with suppression of 2D nucleation

〇Yuta Nakano¹, Shu Inagaki¹, Kazuki Kobayashi¹, Moriyoshi Haruyama², Hiromitsu Kato², Christoph E. Nebel^1,3, Xufang Zhang¹, Tsubasa Matsumoto¹, Takao Inokuma¹, Satoshi Yamasaki¹, Norio Tokuda¹ (1.Kanazawa Univ., 2.AIST, 3.Diacara)

Keywords:diamond, nitrogen, nucleation

In this study, we investigated the impact of nitrogen-doped growth of nitrogen concentration, growth rate and two-dimensional (2D) nucleation density on the lateral growth mode. We also investigated the orientation C and the spin coherence time T₂ of NV^- depending on the growth mode. As a result, we achieved heavily nitrogen concentration 2×10²⁰ atoms/cm³ with suppression 2D nucleation by using the lateral growth mode. Furthermore, good properties of C and T₂ were also obtained, indicating the superiority of nitrogen-doped lateral growth.