[25a-E204-1~10] 6.2 Carbon-based thin films

△ [25a-E204-2] Fabrication of Ultra High-Concentration Nitrogen-doped CVD Diamond and Evaluation of the Physical Properties

〇(B)Mayu Ueda¹, Kyosuke Hayasaka¹, Kyotaro Kanehisa¹, Yasuhiro Takahashi¹, Chiyuki Wakabayashi¹, Taisuke Kageura^1,2, Hiroshi Kawarada^1,3 (1.Waseda Univ., 2.NIMS, 3.ZAIKEN)

Keywords:CVD diamond

The fabrication of high concentration nitrogen doped diamond is expected to realize high sensitivity magnetic sensing by NV centers. On the other hand, it has been reported that the film quality can be improved by 1:1 supply of carbon and oxygen during deposition. In this study, we investigated the effect of oxygen introduction during film deposition and the high concentration of nitrogen doping. ultra high concentration nitrogen doped diamond was prepared by CVD method and the physical properties of the thin films were evaluated by X-ray diffractometer and transmission electron microscope.