[25a-E204-1~10] 6.2 Carbon-based thin films

[25a-E204-3] [The 43rd JSAP Paper Award Speech] Electrical properties and conduction mechanisms of heavily B⁺-ion-implantation type IIa diamond: effects of temperatures during the ion implantation and postannealing upon electrical conduction

〇Yuhei Seki¹, Yasushi Hoshino¹, Jyoji Nakata¹ (1.Kanagawa Univ.)

Keywords:Ion implantation, Hall effect, Diamond semiconductor