1:45 PM - 2:00 PM
[25p-E102-2] Theoretical analysis on deceleration of CVD growth of graphene by chemical vapor deposition
Keywords:graphene, CVD, crystal growth
Recently, monolayer domain growth has been observed real time by focusing the radiation emitted from the graphene; the method is termed radiation-mode optical mi- croscopy (Rad-OM).Here, we scrutinize the observed domain growth and show that the domain growth is decelerated after a certain time period because the rate-determining factor changes from the (incorporation) reaction limited to the diffusion limited as the domain size increases. We also show the lower bound of the incorporation velocity into the domain and the upper bound of the desorption rate constant of precursors from the substrate could be estimated by Rad-OM.