2022年第69回応用物理学会春季学術講演会

講演情報

一般セッション(口頭講演)

15 結晶工学 » 15.4 III-V族窒化物結晶

[25p-E203-1~17] 15.4 III-V族窒化物結晶

2022年3月25日(金) 13:30 〜 18:15 E203 (E203)

荒木 努(立命館大)、菊池 昭彦(上智大)、小田 将人(和歌山大)

16:15 〜 16:30

[25p-E203-11] The new material wurtzite AlPyN1-y

〇Markus Pristovsek1 (1.CIRFE, IMaSS, Nagoya University)

キーワード:wurtzite nitrides, HEMT, cathodoluminescence

The new material wurtzite AlPyN1-y is introduced. Since P is larger than N but smaller than Al, the material is only stochiometric in the absence of compressive strain, i.e. for P content <11% when grown on GaN. AlPyN1-y can replace Al1-xScxN, Al1-xInxN, or AlxGa1-xN as barrier material in high electron mobility transistors, since it is easier to manufacture than AlScN or AlInN but offers a higher polarisation induced charge than AlGaN.
This exploratory work reports the first two-dimensional electron gas. A sheet carrier density of 1013 cm-2 with 400 cm2/Vs mobility at 30 K on non-optimized structures show the potential of AlPN. First band edge measurements using room temperature cathodoluminescence show a huge bowing of 20 eV, which is currently under further investigation.