The 69th JSAP Spring Meeting 2022

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15 Crystal Engineering » 15.4 III-V-group nitride crystals

[25p-E203-1~17] 15.4 III-V-group nitride crystals

Fri. Mar 25, 2022 1:30 PM - 6:15 PM E203 (E203)

Tsutomu Araki(Ritsumeikan Univ.), Akihiko Kikuchi(Sophia Univ.), Masato Oda(Wakayama Univ.)

5:00 PM - 5:15 PM

[25p-E203-13] MOVPE Growth Mechanisms of AlInGaN-based Nitride Semiconductors

〇Kazuhiro Ohkawa1, Daisuke Iida1 (1.KAUST)

Keywords:nitride semiconductors, MOVPE, simulation

We will introduce our quantitative simulation on MOVPE growth of GaN, AlN, AlGaN, and InGaN. Based on those results, we will discuss the Nitride MOVPE mechanisms.