The 69th JSAP Spring Meeting 2022

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15 Crystal Engineering » 15.4 III-V-group nitride crystals

[25p-E203-1~17] 15.4 III-V-group nitride crystals

Fri. Mar 25, 2022 1:30 PM - 6:15 PM E203 (E203)

Tsutomu Araki(Ritsumeikan Univ.), Akihiko Kikuchi(Sophia Univ.), Masato Oda(Wakayama Univ.)

5:15 PM - 5:30 PM

△ [25p-E203-14] Determination of carrier gas in HVPE method of p-type GaN by thermodynamic analysis

〇(B)Yuya Nagashima1, Tomoya Kimura2, Masaaki Araidai2,3, Kenta Chokawa2, Akira Kusaba4, Yoshihiro Kangawa4, Kenji Shiraishi2,3 (1.Eng., Nagoya Univ., 2.Graduate School of Eng., Nagoya Univ., 3.IMass, Nagoya Univ., 4.RIAM, Kyusyu Univ.)

Keywords:semiconductor, HVPE, GaN