[25p-E203-1~17] 15.4 III-V-group nitride crystals

[25p-E203-15] TOF-MS gas phase analysis of NH₃ activation by TMGa supply

〇Daisuke Yahara¹, Zheng Ye², Shugo Nitta², Yoshio Honda², Hiroshi Amano^2,3,4 (1.Nagoya Univ., 2.IMaSS, Nagoya Univ., 3.ARC, Nagoya Univ., 4.VBL, Nagoya Univ.)

Keywords:gas phase reaction

V/III is an important parameter in nitride semiconductor MOVPE growth, which has a significant effect on growth rate, composition, morphology, defect formation, and impurity incorporation.
Understanding the reactivity of NH₃ in the gas phase will contribute to more accurate experimental growth mechanisms and to the realization of advanced crystal growth techniques based on simulations. In this study, we analyzed the effect of TMGa supply on the activation of NH₃. As a result, the catalytic effect of TMGa on NH₃ exchange reaction was clarified.