The 69th JSAP Spring Meeting 2022

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15 Crystal Engineering » 15.4 III-V-group nitride crystals

[25p-E203-1~17] 15.4 III-V-group nitride crystals

Fri. Mar 25, 2022 1:30 PM - 6:15 PM E203 (E203)

Tsutomu Araki(Ritsumeikan Univ.), Akihiko Kikuchi(Sophia Univ.), Masato Oda(Wakayama Univ.)

3:00 PM - 3:15 PM

[25p-E203-7] Fabrication and Evaluation of N-polar AlGaN/AlN High Electron Mobility Transistor

〇Wataru Matsumura1, Lu You1, Kazuya Ataka1, Shunsuke Matsuda1, Koki Hanasaku1, Daisuke Inahara1, Yongzhao Yao2, Yukari Ishikawa2, Satoshi Kurai1, Narihito Okada1, Yoichi Yamada1, Kazuyuki Tadatomo1 (1.Grad. School of Sci. & Tech. for Innovation, Yamaguchi Univ., 2.JFCC)

Keywords:semiconductor, MOVPE