Growth and characterization of highly degenerate n-AlGaN grown via sputtering

Presentation information

Oral presentation

15 Crystal Engineering » 15.4 III-V-group nitride crystals

Fri. Mar 25, 2022 1:30 PM - 6:15 PM E203 (E203)

Tsutomu Araki(Ritsumeikan Univ.), Akihiko Kikuchi(Sophia Univ.), Masato Oda(Wakayama Univ.)

3:15 PM - 3:30 PM

〇Yuto Nishikawa¹, Ryota Maeda¹, Kohei Ueno¹, Atushi Kobayashi¹, Hiroshi Fujioka¹ (1.IIS)

Keywords:sputtering, AlGaN, doping