Analysis of the Crosstalk Noise Between PZT Actuator and PZT Displacement Sensor

Yasuyuki Yamamoto, Sohei Matsumoto, Yuki Okamoto, Masaaki Ichiki, Takeshi Kobayashi

Presentation information

Oral presentation

6 Thin Films and Surfaces » 6.1 Ferroelectric thin films

[25p-E305-1~18] 6.1 Ferroelectric thin films

Fri. Mar 25, 2022 1:30 PM - 6:30 PM E305 (E305)

Isaku Kanno(Kobe Univ.), Takeshi Kobayashi(AIST), Shinya Yoshida(Tohoku Univ.)

4:30 PM - 4:45 PM

[25p-E305-12] Analysis of the Crosstalk Noise Between PZT Actuator and PZT Displacement Sensor

〇Yasuyuki Yamamoto¹, Sohei Matsumoto¹, Yuki Okamoto¹, Masaaki Ichiki¹, Takeshi Kobayashi¹ (1.AIST)

Keywords:PZT thin film, Crosstalk Noise, Stray capacitance

The leak route of the crosstalk noise in which the drive signal leaks from the PZT thin film actuator of the silicon MEMS device to the PZT thin film displacement sensor was clarified by circuit analysis. We have experimentally verified the proposed solution and succeeded in significantly reducing crosstalk noise.