[25p-E307-1~15] 13.5 Semiconductor devices/ Interconnect/ Integration technologies

△ [25p-E307-14] Development of FHE Devices for Photobiomodulation Using FOWLP

〇Tadaaki Hoshi¹, Tomo Odashima², Yuki Susumago², Shunsuke Arayama¹, Hisashi Kino³, Tetsu Tanaka^2,3, Takafumi Fukushima^2,3 (1.School of Engineering, Tohoku Univ., 2.Graduate School of Engineering, Tohoku Univ., 3.Graduate School of Biomedical Engineering, Tohoku Univ.)

Keywords:dimethylpolysiloxane, hydrogel, flexible hybrid electronics

Research on flexible hybrid electronics (FHE), which contributes to the creation of high-performance flexible devices by integrating a hard single-crystal semiconductor chip with a flexible organic substrate, has attracted much attention.
This presentation picks up a novel FHE structure in which a small chip is integrated into a substrate using FOWLP.
In this study, we fabricated a prototype device for photo-biomodulation by using a small near-infrared LED chip and adopting FOWLP suitable for each method, which we call Chip-last method for hydrogel substrate and Chip-first method for PDMS substrate with three-dimensional structure.