[25p-F307-1~16] 6.4 Thin films and New materials

△ [25p-F307-1] Heat Resistant Black Insulative Al-Doped Ag-Fe-O Thin Films For Touch Panel Displays

〇(DC)Mina Yamaguchi¹, Akihiro Ishii¹, Itaru Oikawa¹, Yusuke Yamazaki², Masaaki Imura², Hitoshi Takamura¹ (1.Tohoku Univ., 2.Nippon Electric Glass)

Keywords:Optical coating, Nano composite, Transparent conductor

The black insulative materials with strong and constant visible light absorption and high electrical resistance are required to improve the design flexibility and visibility of touch panel displays. The reported black insulative Ag-Fe-O films shows poor heat stability, which made it difficult to apply them to high temperature devices and to use high temperature processes for fabricating multilayer coatings. In this study, Al-doping to Ag-Fe-O thin films was performed with the aim of inhibiting cation diffusion and improving heat resistance. The 60mol%Ag-40mol%(Fe_1-xAl_x)-O (x=0, 0.25, 0.50, 0.75, and 1.0) thin films are prepared by pulsed laser deposition, and their optical properties, electric resistance, and thermal stability are clarified by combining the experimental data and DFT calculations.