1:30 PM - 3:30 PM
[25p-P01-18] Non-destructive spectral analysis of AlxGa1-xN films by synchrotron soft X-ray photoelectron spectromicroscopy
Keywords:Wide gap semiconductor, photoelectron spectroscopy
III-V semiconductors are attracting attention as materials for light-emitting devices and high-frequency devices. However, there are few examples of non-destructive measurements of III-V semiconductors by photoemission spectroscopy due to charging problems. We have succeeded in obtaining photoemission spectra of AlGaN samples using focused synchrotron radiation, which is less affected by charging. In this presentation, we will show an example of depth profile analysis.