The 69th JSAP Spring Meeting 2022

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13 Semiconductors » 13.3 Insulator technology

[26a-E103-1~9] 13.3 Insulator technology

Sat. Mar 26, 2022 9:00 AM - 11:30 AM E103 (E103)

Kiyoteru Kobayashi(Tokai Univ.), Shoichi Kabuyanagi(キオクシア)

9:00 AM - 9:15 AM

[26a-E103-1] Investigation of PMA metal species effective for improving GeO2 film quality and
GeO2/Ge interface properties

〇Akari Kekke1, Tomo Ueno1, Yoshitaka Iwazaki1, Hirotaka Iino1 (1.TUAT)

Keywords:semiconductor