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13 Semiconductors » 13.3 Insulator technology

[26a-E103-1~9] 13.3 Insulator technology

Sat. Mar 26, 2022 9:00 AM - 11:30 AM E103 (E103)

Kiyoteru Kobayashi(Tokai Univ.), Shoichi Kabuyanagi(キオクシア)

9:45 AM - 10:00 AM

[26a-E103-4] Investigation of Low Temperature Oxidation of Si Substrates Using Chemical Solutions

〇Hiroki Takahashi¹, Oki Tastunori¹, Yoshitaka Iwazaki¹, Tomo Ueno¹ (1.TUAT)

Keywords:semiconductor