The 69th JSAP Spring Meeting 2022

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Oral presentation

13 Semiconductors » 13.3 Insulator technology

[26a-E103-1~9] 13.3 Insulator technology

Sat. Mar 26, 2022 9:00 AM - 11:30 AM E103 (E103)

Kiyoteru Kobayashi(Tokai Univ.), Shoichi Kabuyanagi(キオクシア)

10:30 AM - 10:45 AM

[26a-E103-6] Influence of sputtering gas pressure, Ar/N2 flow ratio and Si addition on film properties of silicon nitride

〇Tomohiro Matsuda1, Takumi Kidokoro1, Hiroshi Katsumata1 (1.Meiji Univ.)

Keywords:Semiconductor-based solid battery, Nanocrystal, Peeling off