The 69th JSAP Spring Meeting 2022

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15 Crystal Engineering » 15.7 Crystal characterization, impurities and crystal defects

[26a-E104-1~11] 15.7 Crystal characterization, impurities and crystal defects

Sat. Mar 26, 2022 9:00 AM - 12:00 PM E104 (E104)

Hidetoshi Suzuki(Miyazaki Univ.), Haruo Sudo(GlobalWafers), Yuji Mukaiyama(STR Japan)

11:45 AM - 12:00 PM

[26a-E104-11] Thermal behavior of hydrogen and oxygen in boron-doped CZ silicon wafer

〇Katsuto Tanahashi1, Katsuhiko Shirasawa1, Shunsuke Heito2, Hidetaka Takato1 (1.AIST, 2.KYOCERA)

Keywords:silicon, hydrogen, thermal behavior