The 69th JSAP Spring Meeting 2022

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15 Crystal Engineering » 15.7 Crystal characterization, impurities and crystal defects

[26a-E104-1~11] 15.7 Crystal characterization, impurities and crystal defects

Sat. Mar 26, 2022 9:00 AM - 12:00 PM E104 (E104)

Hidetoshi Suzuki(Miyazaki Univ.), Haruo Sudo(GlobalWafers), Yuji Mukaiyama(STR Japan)

11:00 AM - 11:15 AM

[26a-E104-8] Dislocation density analysis of a-, c-, and m-Al2O3 by 3-D numerical analysis

〇Koichi Kakimoto1, Satoshi Nakano1 (1.RIAM, Kyushu Univ.)

Keywords:Al2O3, simulation, dislocation

We carried out dislocation density by using 3D and time dependent calculation of a-, c-, and m-Al2O3 . The results shows that c-axis crystal has 6-folded symmetry while a- and m-axes crystals have 2-folded symmetry.